HAFUHH0100L4AXT

The HAF series Zephyr™ Sensor that provides a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow. Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. The sensors are fully calibrated and temperature compensated with an on-board ASIC. These sensors operate on the heat transfer principle to measure mass airflow. They consist of a micro bridge MEMS with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow. Zephyr sensors provide the customer with enhanced reliability, repeatable measurements and the ability to customize sensor options to meet many specific application needs.

• Standard flow ranges are 10, 15, 20, 50, 100, 200 or 300SLPM with custom flow ranges
• Precise measurement
• Total error band (TEB)
• High accuracy
• Fast response time (1ms)
• High stability
• High sensitivity at very low flows
• 12-bit High resolution
• Choice of port styles
• Linear output
• ASIC-based I²C digital output
• Factory or custom calibration for multiple gas types

Applications

Sensing & Instrumentation, Medical, Industrial