FMA-2611A

FMA-2611A is a FMA-2600A series mass and volumetric flow controller. It uses the principle of differential pressure within a laminar flow field to determine and control mass flow rate. A laminar flow element (LFE) inside the meter forces the gas into laminar (streamlined) flow. Inside this region, the poiseuille equation dictates that the volumetric flow rate be linearly related to the pressure drop. A differential pressure sensor is used to measure the pressure drop along a fixed distance of the LFE. This, along with the viscosity of the gas, is used to accurately determine the volumetric flow rate. Separate absolute temperature and pressure sensor is incorporated and correct the volumetric flow rate to a set of standard conditions. This standardized flow rate is commonly called the mass flow rate and is reported in units such as standard cubic feet per minute (SCFM) or standard liters per minute (SLM).

• 1/2 FNPT connection, 250 SLM maximum flow
• 130+ gas calibrations including pure and mixed gases
• Pressure, temperature, and volumetric and mass flow simultaneously displayed
• Easy-to-use pushbutton interface, NIST traceability standard
• Full scale ranges from 0.5 SCCM to 3000 SLM, 2.4% FS excess flow rate
• Response time of 50 to 100ms typical, 0 to 100% RH, non-condensing humidity range
• Turndown ratio of 200:1, position insensitive, 100ms control response time
• RS232 standard, ±0.8% reading accuracy, ±0.2% FS repeatability
• Custom live gas blend programming
• Operating temperature range from -10°C to 50°C